• Fast and accurate magnetic linear motors
  • Measurement speed 2kHz / 4kHz / 20 kHz
  • 315 mm travel in x‑ and y‑direction, lateral resolution 0.05 µm, optional motorized z‑axis
  • 2D profiles and 3D topographical maps (topography measurement)
  • Large scanning areas, up to the maximum travel of 315 mm with maximum x‑, y‑, z‑resolution
  • Chromatic white light sensors
  • 3D white light interferometer
  • Confocal microscope
  • Interferometer for thickness measurement
  • High‑speed confocal line sensor
  • High resolution off‑axis camera