315 mm travel in x‑ and y‑direction, lateral resolution 0.05 µm, optional motorized z‑axis
2D profiles and 3D topographical maps (topography measurement)
Large scanning areas, up to the maximum travel of 315 mm with maximum x‑, y‑, z‑resolution
Chromatic white light sensors
3D white light interferometer
Confocal microscope
Interferometer for thickness measurement
High‑speed confocal line sensor
High resolution off‑axis camera
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