Fast and accurate 3‑axis scanning system for round parts
Measurement speed: 14 kHz
Precision rotary stage with torque motor and 0.0001° resolution
Magnetic linear motor with 200 mm travel in x, lateral resolution 50 nm
closed loop control and autofocus function
50 mm motorized z‑axis, resolution 1 µm
Inner diameters from 35 mm to 200 mm
Outer diameter from 5 mm to 190 mm
Chromatic white light sensor
Resolution 10 nm
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