2D Profile Measurement
- Step Height (avg., max. and min. height)
- Flatness and Warpage
- Width and Length
- Cross Section Area
- Angle, Radius, Contour Analysis
Define base line and measurement areas using reference and measurement cursors. Select analysis from dropdown menu.
Profile Roughness Measurement
- DIN EN ISO conform Roughness Parameters
- Shape Removal Algorithm
- Abbott-Firestone Material Curve
- Histogram
- Tip Simulation for Non-Contact Systems
Advanced roughness analysis, even on round or angled surfaces using shape compensation. Display waviness and roughness profile.
3D Coplanarity Measurement
- 3D Height (avg., max. and min. height)
- Flatness and Warpage
- Coplanarity
Draw rectangle, round or polygon cursors to define base plane and measurement areas.
3D Volume & Area Measurements
- Volume (Cuts, Fills, Net Volume)
- Planar area
- Surface area
Measures cuts and fills and uses height threshold. Accurate areal and planar surface calculations.
3D Roughness Measurements
- New DIN EN ISO 25178 Parameters
- 3D Waviness Filters
- 3D Abbott-Firestone material curve, Histogram
Use advanced DIN /TS 16610 Filters. 3D Roughness Analysis even on warped or uneven surfaces.
2D / 3D Surface Compensation
- 2D and 3D Polynom Fit
- Pre- and after measurements
- Areal Waviness Compensation
Surface compensation is only applied based on the data in the reference cursors.
Parallel Data Collection
- Parallel scanning with up to 4 sensors
- Collect Top, Bottom and Thickness data
- Average Thickness, Bow and Curvature
- Total Thickness Variation
- Parallel Intensity Masking
Graphical display of thickness maps and top/bottom surfaces.
More Features and Highlights
- x-, y-, z-data stitching capability
- 2D and 3D etch detection algorithm
- 3D surface matching
- Raster up to 400,000,000 data points
- Integrated user management
Compare geometry by overlaying profiles.
