Features & Benefits

  • PLC controller with touch screen provides an intuitive graphical interface and real time process representation
  • Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode
  • 13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility
  • Proprietary software control system generates process and production data for statistical process control
  • Batch style, each unit is completely self-contained, requiring minimal floor space
  • The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure