PLC controller with touch screen provides an intuitive graphical interface and real time process representation
Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode
13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility
Proprietary software control system generates process and production data for statistical process control
Batch style, each unit is completely self-contained, requiring minimal floor space
The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure
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