Features & Benefits

Ultimate application flexibility for direct, downstream and ion-free (patented) plasma, which allows treatment without exposure to ion and UV
Easily integrates with a variety of process equipment, including wire bond, die attach, dispense, mold, and marking
Slim structure that requires minimal floor space, all service components are easily accessible from the front
Compact, three-axis symmetrical chamber and proprietary process control for unmatched process uniformity
Industry leading throughput capacity with short cycle times