Fast, precise and accurate magnetic linear motors with air bearings
Measurement speed 4 kHz / 20 kHz
600 mm travel in x‑ and y‑direction, lateral resolution 0.05 µm, motorized z‑axis
2D profiles and 3D topographical maps (topography measurement)
Large scanning areas, up to the maximum travel of 600 mm at maximum x‑, y‑, z‑resolution
Chromatic white light sensors
Resolution down to 3 nm, measurement range up to 12 mm
High resolution off‑axis colour camera
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