• Fast, precise and accurate magnetic linear motors with air bearings
  • Measurement speed 4 kHz / 20 kHz
  • 600 mm travel in x‑ and y‑direction, lateral resolution 0.05 µm, motorized z‑axis
  • 2D profiles and 3D topographical maps (topography measurement)
  • Large scanning areas, up to the maximum travel of 600 mm at maximum x‑, y‑, z‑resolution
  • Chromatic white light sensors
  • Resolution down to 3 nm, measurement range up to 12 mm
  • High resolution off‑axis colour camera