- Resolution down to 3 nm
- Measurement range up to 25 mm
- High numeric aperture models
- Small measurement spot
- Multi‑Sensor mount
- High speed‑ 2 kHz, 4 kHz and 14 kHz
- Compatible with white light interferometer for thickness measurement
Light consisting of different wavelengths is projected on different height levels.
The spectrometer analyzes intensity vs. wavelength. A height reading is generated when the intensity of a certain wavelength reaches a maximum in the spectrometer.
For all available models of sensors please review the sensor brochure in the datasheet section.