ADT 977 Wafer Cleaner Systems are designed for cleaning workpieces after dicing.
Efficient compact cleaning units to support your process
The systems are offered in three basic configurations :
977 System Highlights :
Options:
| 977- 200 | 977L – 300 | |
| Max. wafer size | Ø 200 mm | Ø 300 mm |
| Cleaning method |
Atomizing cleaning/ High pressure cleaning |
Atomizing cleaning/ High pressure cleaning |
| Number of recipes that can be saved | 8 | 8 |
| Spinner velocity range | 200–3000 rpm | 200–2500 rpm |
| Machine dimensions (WxDxH) | 410 x 625 x 950 mm | 520 x 809 x 950 mm |
| Approx. machine weight | 100 kg | 160 kg |
ADT Wafer Cleaner Brochure
ADT Peripheral Equipments
