ADT 977, 977L

ADT 977 Wafer Cleaner Systems are designed for cleaning workpieces after dicing.

Efficient compact cleaning units to support your process

The systems are offered in three basic configurations :

WCS-977 – round wafer up to 8″
WCS-977LA – round wafer up to 12″
WCS-977D – a standalone coating/de-coating station with:
*Wafer spin coating technology
*Absolute surface protection during dicing
*100% removal of contamination and residue
*Atomized cleaning and N2 drying

If you want to know more about ADT 977, 977L

977 System Highlights :

Options:

	977- 200	977L – 300
Max. wafer size	Ø 200 mm	Ø 300 mm
Cleaning method	Atomizing cleaning/ High pressure cleaning	Atomizing cleaning/ High pressure cleaning
Number of recipes that can be saved	8	8
Spinner velocity range	200–3000 rpm	200–2500 rpm
Machine dimensions (WxDxH)	410 x 625 x 950 mm	520 x 809 x 950 mm
Approx. machine weight	100 kg	160 kg

ADT Wafer Cleaner Brochure

ADT Peripheral Equipments

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