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ADT 7120 / 7130 Series

An On-going Success Story

The 7120 / 7130 family of 2” and 4” spindle dicing systems deliver a high level of affordability and flexibility.

With different models to choose from, each optimized for a specific range of applications, the 7120 / 7130 Series covers the widest range of applications, offering the lowest possible cost of ownership while providing the most advanced dicing technology available.

Description

The 7120 / 7130 Series Dicing Systems offer a wide range of advanced automation and process monitoring options to meet the requirements of your most challenging dicing applications:   

  • Ceramic Substrates & Capacitors
  • Glass
  • Automotive Sensors
  • PZT
  • Glass on Silicon
  • LED & LED on PCB Packages
  • Package Singulation (BGA & QFN)
  • Opto-electronic Components
  • SAW Filters
  • Sensors & MEMS
  • LTCC
  • IC Wafers

7120 / 7130 Series Features & Options:

  •   Extra Large Area Dicing (7100 XLA)
  •   Large Area
  •   Tilting Spindle
  •   Dressing Station for diamonds exposure and clogging prevention

7120 / 7130 Series Advantages  

  • 2” and 4” spindle dicing systems
  • A full range of automatic vision capabilities
  • Advanced hardware platform for high reliability and low maintenance
  • Heavy Duty, cast-iron base structure for superior precision and accuracy
  • Increased yield, throughput and process control
  • Unique multi-panel processing capabilities
  • Special blade wear forecast algorithm
  • User-friendly software platform
Model 7122

2″, DC-brushless, 1.2 kW, front-mounted, air-bearing spindle (60 krpm Max.), with closed-loop turntable.

Optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm, such as:

  • Opto-electronic Components
  • PCB BGA Panels
  • High-brightness LED Packages
  • Silicon Wafers
  • SAW Filters
  • Glass/Silicon Sensors
  • MEMS
  • PZT

System Specifications

  • Work piece size: up to 200mm x 200mm
  • Large Are Configuration: up to 300mm x 300mm
  • Blade size: 2″-3″
  • Spindle: Air-bearing, DC-brushless, 60 krpm/1.2 kW, High power 2.4kW Spindle (optional)

Indexing Axis (Y)

  • Drive: Ball bearing lead screw with stepper motor
  • Control: linear encoder
  • Resolution: 0.2 µm
  • Cumulative accuracy: 1.5 µm
  • Indexing accuracy: 1.0 µm

 

Feed Axis (x)

  • Air slide
  • Drive: Ball bearing lead screw with DC-brushless motor
  • Feed rate: up to 600 mm/sec

Cut Depth Axis (z)

  • Drive: Ball bearing lead screw with stepper motor
  • Resolution: 0.2 µm
  • Accuracy: 2.0 µm
  • Repeatability: 1.0 µm
  • Stroke: 50 mm
  • Rotary encoder
  • Z Liner Encoder – Optional
  • Z Clearance up to 3″ – Optional

Rotary Axis (Ø)

  • Drive: closed-loop, direct drive, DC-brushless
  • Accuracy: 4 arc-sec
  • Repeatability: 4 arc-sec
  • Stroke: 350 deg.

Vision System

  • Digital camera, Fire-wire technology, Hight bright LED illumination (vertical & oblique)
  • Continuous digital magnification from x55 to x210 or from x35 to x140 (optional).

Utilities

  • Electrical: 200-240 VAC, 50/60 Hz, single phase
  • Air: 260 L/min @ 5.5 bar
  • Spindle coolant: 1.1 L/min tap water
  • Cutting water: up to 3 L/min

Dimensions (WXDXH)

  • 965 x 1300 x 1600 mm
  • Weight: 900 kg
Model 7123

Front mount 2″ air bearing spindle, up to 1.2KW at 60krpm. DC Brushless motor provides close-loop speed control. Compatible with 2″-3″ hub and hubless blades. Coveriing up to 12″ round products, 12″ x 9″ square substrates with frame or 12″ x 12″ chuck without frame.

The system is equiped with close-loop turn table, optimized for large panels and multi panels such as:

  • 12″ and 8″ Silicon wafers
  • PCB, QFN and BGA Panels
  • High-brightness LED Packages
  • SAW Filters

System Specifications:

  • Large Are Configuration: up to 300mm x 300mm
  • Blade size: 2″-3″
  • Spindle: Air-bearing, DC-brushless, 60 krpm/1.2 kW
  • High power 2.4kW Spindle (optional)

Indexing Axis (y)

  • Drive: Ball bearing lead screw with stepper motor
  • Control: linear encoder
  • Resolution: 0.2 µm
  • Cumulative accuracy: 1.5 µm
  • Index accuracy: 1.0 µm

Feed Axis (x)

  • Air slide
  • Drive: Ball bearing lead screw with DC-brushless motor
  • Feed rate: up to 600 mm/sec

Cut Depth Axis (z)

  • Drive: Ball bearing lead screw with stepper motor
  • Resolution: 0.2 µm
  • Accuracy: 2.0 µm
  • Repeatability: 1.0 µm
  • Stroke: 50 mm
  • Rotary encoder
  • Z Liner Encoder – Optional
  • Z Clearance up to 3″ – Optional

Rotary Axis (Ø)

  • Drive: closed-loop, direct drive, DC-brushless
  • Accuracy: 4 arc-sec
  • Repeatability: 4 arc-sec
  • Stroke: 350 deg.

Vision System

  • Digital camera, Fire-wire technology, Hight bright LED illumination (vertical & oblique)
  • Continuous digital magnification from x55 to x210 or from x35 to x140 (optional).

Utilities

  • Electrical: 200-240 VAC, 50/60 Hz, single phase
  • Air: 260 L/min @ 5.5 bar
  • Spindle coolant: 1.1 L/min tap water
  • Cutting water: up to 3 L/min

Dimensions (WXDXH)

  • 965 x 1300 x 1600 mm
  • Weight: 900 kg
Model 7124

4″, DC-brushless, 2.5 kW, air-bearing spindle, (30 krpm Max.), with closed-loop turntable.

Optimized for high-precision, multi-panel dicing of thick and hard material applications up to 200 mm x 200 mm, such as:

  • Glass
  • DWDM Optical Filters
  • Thick Ceramic Substrates

System Specifications:

  • Work piece size: up to 200 mm x 200 mm
  • Large Are Configuration: up to 300mm x 300mm
  • Blade size: 4″-5′
  • Spindle: Air-bearing, DC-brushless, 30 krpm/2.5 kW

Indexing Axis (y)

  • Drive: Ball bearing lead screw with stepper motor
  • Control: linear encoder
  • Resolution: 0.2 µm
  • Cumulative accuracy: 1.5 µm
  • Index accuracy: 1.0 µm

Feed Axis (x)

  • Air slide
  • Drive: Ball bearing lead screw with DC-brushless motor
  • Feed rate: up to 600 mm/sec

Cut Depth Axis (z)

  • Drive: Ball bearing lead screw with stepper motor
  • Resolution: 0.2 µm
  • Accuracy: 2.0 µm
  • Repeatability: 1.0 µm
  • Stroke: 50 mm
  • Rotary encoder  
  • Z Liner Encoder – Optional
  • Z Clearance up to 3″ – Optional

Rotary Axis (Ø)

  • Drive: closed-loop, direct drive, DC-brushless
  • Accuracy: 4 arc-sec
  • Repeatability: 4 arc-sec
  • Stroke: 350 deg. 

Vision System

  • Digital camera, Fire-wire technology, High bright LED illumination (vertical & oblique)
  • Continuous digital magnification from x55 to x210 or from  x35 to x140 (optional)

Utilities

  • Electrical: 200-240 VAC, 50/60 Hz, single phase
  • Air: 260 L/min @ 5.5 bar
  • Spindle coolant: 1.1 L/min tap water
  • Cutting water: up to 3 L/min

Dimensions (WXDXH)

  • 965 x 1300 x 1600 mm
  • Weight: 900 kg 

Model 7134

4″ high power air bearing spindle, up to 2.5KW at 30krpm. DC Brushless motor provides close-loop speed control. Coveriing up to 12″ round products, 12″ x 9″ square substrates with frame or 12″ x 12″ chuck without frame.

The system is equiped with close-loop turn table, optimized for multi-angle dicing suitable for variety of products such as:

  • Ceramic substrates
  • Alumina
  • Hybrids
  • Thick film devices and more

System Specifications:

  • Large Are Configuration: up to 300mm x 300mm
  • Blade size: 4″-5′
  • Spindle: Air-bearing, DC-brushless, 30 krpm/2.5 kW

Indexing Axis (y)

  • Drive: Ball bearing lead screw with stepper motor
  • Control: linear encoder
  • Resolution: 0.2 µm
  • Cumulative accuracy: 1.5 µm
  • Index accuracy: 1.0 µm

Feed Axis (x)

  • Air slide
  • Drive: Ball bearing lead screw with DC-brushless motor
  • Feed rate: up to 600 mm/sec

Cut Depth Axis (z)

  • Drive: Ball bearing lead screw with stepper motor
  • Resolution: 0.2 µm
  • Accuracy: 2.0 µm
  • Repeatability: 1.0 µm
  • Stroke: 50 mm
  • Rotary encoder
  • Z Liner Encoder – Optional
  • Z Clearance up to 3″ – Optional

Rotary Axis (Ø)

  • Drive: closed-loop, direct drive, DC-brushless
  • Accuracy: 4 arc-sec
  • Repeatability: 4 arc-sec
  • Stroke: 350 deg.

Vision System

  • Digital camera, Fire-wire technology, High bright LED illumination (vertical & oblique)
  • Continuous digital magnification from x55 to x210 or from x35 to x140 (optional)

Utilities

  • Electrical: 200-240 VAC, 50/60 Hz, single phase
  • Air: 260 L/min @ 5.5 bar
  • Spindle coolant: 1.1 L/min tap water
  • Cutting water: up to 3 L/min

Dimensions (WXDXH)

  • 965 x 1300 x 1600 mm
  • Weight: 900 kg
Model 71 XLA (Extra Large Area Dicing

7100 XLA is available with 2″ spindle or 4″ spindle.

The system capable to handle up to 18″ x 24″ size singulating large PCB substrates or hard and brittle glass and ceramic panels.

Features & Benefits

  • Large dicing area up to 18” X 24”
  • Available on the 2” spindle  and 4” spindle  
  • Typical application: Glass panels, PCB, Ceramic, FR4 + Copper, QFN and more
  • Increase theta precision for high accuracy over long cut lengths
  • Easy access for maintenance
  • Customized chucks confirgurations
  • Adjustable rotating monitor + USB hub
 

New User Interface (NUI) Upgrade Kit

 A New User Interface (NUI) Upgrade Kit

State of the Art Technology!

ADT strives to offer our customers a business model that promotes “continuous improvement opportunities” for your existing capital equipment investment.

ADT offers a variety of “DICING SAW UPGRADE KITS” that allow you to maintain best in class dicing capability and performance.

Key Conversion Justification Points:

  • Windows XP is no longer supported by Microsoft.  This kit has Windows 7 embedded.
  • ADT will no longer offer software upgrades to the ADT Dicing Saw XP software.
  • Moving to NUI Software will ensure you continue to get free software upgrades.
  • Equipment users are more familiar with touch screen technology with the global use of smart phones and touch PC’s and Laptops.  This conversion will offer operator & technician simplicity.
  • Behind the scenes, process technicians will have all the flexibility of the vast capability that ADT is known for.
  • Therefore, operators get ease of use and training while process engineers get to keep the tremendous depth of capability.
Dicing Floor Management (DFM)

DFM system is a software and hardware option based on SECS/GEM* communication protocol that collects data and monitors all dicing saw machines at the production floor.

The DFM system will generate detailed reports such as UPH, up time, production data and other useful information for the production managers and is also of great value to your customers who demand data tracking.

Full barcode capability is embedded in the system for operator simplicity.

The DFM system will support up to 30 ADT different dicing saw machines.

The main advantages:

  • Transparency & real time visibility of the production floor
  • Progressive production monitoring
  • Monitoring the production efficiency
  • Tracking operator performances
  • Increasing productivity
  • Increased reliability and quality
  • Easy to file reports (daily, weekly and monthly)
  • Blade inventory management
  • Recipe backups
  • Capability to transfer recipe between the systems
Coating De-coating system

Many applications, as MEMS devices and Optic components, are sensitive to the environment developed during the dicing process.

To protect the wafer during the dicing process, avoiding component damage, ADT has developed an option which coats the wafer with a very thin film of a transparent coating material before the dicing process, later removed as part of the wafer cleaning process.

Dressing Procedure

ADT has developed a new software feature that provides the ability to ‘dress and drag’ (Y axis moves forward at a programmed speed dragging the blade into the dress material) the blade to maintain a flat edge on the dicing blade instead of a standard “dicing” methods on a dress block.

This feature is available on the new 7120 / 7130 / 7220 dicing machines.

Field retrofit is available.

Tapeless 7134 dicing saw

ADT has recently completed a new project for dicing in a tapeless process mode. The work piece is placed on a formal rubber pad with vacuum holes, holding the workpiece and diced parts in place during the dicing process without the use of dicing tape.

To create a high level of vacuum on the tapeless dicing chuck, the dicing machine is configured with a special high level vacuum pump and a special large water separator.

The above solution is also available on the 7122 / 7132 / 7124 dicing systems, including the possibility of supporting small dies.

Barcode Reader


The dicing saws support the option of adding a Barcode reader.
On the semi-automatic dicing machines (7120 / 7130) the barcode reader is external while on the automatic dicing saws (7220) the barcode reader is internal.

This option supports various types of barcodes that can be read from the frame, from the cassette or from a paper.

Scrap Removal

The Scrap Removal kit was designed for customers dicing applications that create a lot of dirt and/or want to filter and manage the cutting waste.
This kit includes a surface that guides the water and diced remaining to a tank before going to the drain.

*This option is available with orders of new dicing machines only.


ADT 7120 / 7130Series Datasheet