The CT 300 is a non‑contact profilometer with a 315 mm x‑, y‑motion system. It can handle up 12” wafers or other large substrates and parts.
Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z‑direction down to 0.1 nm. With our multi‑sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measuring wafer thickness.