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CT 300 Non-Contact Profilometer for Large Area

Utilising the same technology as the CT 100, the CT 300 is designed to offer a larger automated scanning area of 315 mm in both x and y axes. The system also allows for the addition of an additional sensor to increase the scope of measurements available to the operator. The full range of white light confocal sensors can be used, as well as the microscope systems for use on ultra‑flat surface assessment to nanometre levels over large areas.

Description

The CT 300 is a non‑contact profilometer with a 315 mm x‑, y‑motion system. It can handle up 12” wafers or other large substrates and parts.

Using a chromatic white light sensor and a data collection rate of up to 20 kHz the inspection time is minimized. The confocal microscope and 3D white light interferometer sensors offer unmatched resolution in z‑direction down to 0.1 nm. With our multi‑sensor technology several sensor heads can be mounted simultaneously including infrared interferometers for measuring wafer thickness.

  • Fast and accurate magnetic linear motors
  • Measurement speed 2kHz / 4kHz / 20 kHz
  • 315 mm travel in x‑ and y‑direction, lateral resolution 0.05 µm, optional motorized z‑axis
  • 2D profiles and 3D topographical maps (topography measurement)
  • Large scanning areas, up to the maximum travel of 315 mm with maximum x‑, y‑, z‑resolution
  • Chromatic white light sensors
  • 3D white light interferometer
  • Confocal microscope
  • Interferometer for thickness measurement
  • High‑speed confocal line sensor
  • High resolution off‑axis camera

CT 300 Datasheet