• Fast, precise and accurate magnetic linear motors with air bearings
  • 4 kHz / 20 kHz measurement speed
  • 350 mm travel in x‑ and y‑direction, motorized 200 mm z‑axis, glass scales with 1 nm resolution
  • 2D profiles and 3D topographical maps (topography measurement)
  • Large scanning areas, up to the maximum travel of 350 mm at maximum x‑, y‑, z‑resolution
  • Chromatic white light sensors with a resolution down to 3 nm
  • High resolution off‑axis colour camera