Fast, precise and accurate magnetic linear motors with air bearings
4 kHz / 20 kHz measurement speed
350 mm travel in x‑ and y‑direction, motorized 200 mm z‑axis, glass scales with 1 nm resolution
2D profiles and 3D topographical maps (topography measurement)
Large scanning areas, up to the maximum travel of 350 mm at maximum x‑, y‑, z‑resolution
Chromatic white light sensors with a resolution down to 3 nm
High resolution off‑axis colour camera
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